"sama" is used for Shinto gods ("kami-sama")

Sama
Sama (様, Sama?) is the formal version of san. This honorific is used primarily in addressing persons much higher in rank than oneself and in commercial and business settings to address and refer to customers. It also appears in words used to address or speak of persons or objects for which the speaker wishes to show respect or deference, such as okyaku-sama (customer) or Tateishi-sama (a stone revered as a deity). Additionally, Japanese Christians will refer to God in prayer as Kami-sama. People will also affix sama to the names of personages who have a special talent or are considered particularly attractive, though this usage can also be tongue-in-cheek, exaggerated, or even ironic. Examples include "Tanaka-sama" to refer to a young man named Tanaka who is considered rather handsome by his admirers and the "Leo-Sama" (or "Reo-sama") that has become the media's pet name for Leonardo DiCaprio. Further, sama can be used to express arrogance (or self-effacing irony), such as in the arrogant male pronoun ore-sama ("my esteemed self") for "I". Referring to oneself with -sama is considered to be highly egotistical.

Sama also follows the addressee's name on postal packages and letters and is frequently seen in business e-mails.

It is worth noting that the sama appearing in such set phrases as o-machidō sama ("sorry to keep you waiting"), o-tsukare sama (an expression of empathy for people who have been working long and hard), and go-kuro sama (an expression recognizing someone's labors), though written with the same kanji, is etymologically and semantically distinct from the sama used as term of address.

In the same way that chan is a version of san, there is also chama from sama, typically used for an older person